Specification
Wavelength | 248 nm |
Max. pulse energy | 1000 mJ |
Max. repetition rate | 200 Hz |
Max. average power | 150 W |
Energy stability (sigma, %) | < 1 % |
Beam dimension (V х H) | 36 x 17 (± 2) mm |
Divergency (FWHM, V х H) | < 3.5 x 1.10 mrad |
Pulse duration (FWHM) | 30 ns |
Cooling | water |
Weight | 750 kg |
Dimension (L х W х H) | 2300 x 750 x 1200 mm |
Power | 220/380 V, 50 Hz, < 10000 VA |