Specification
Wavelength | 248 nm | 308 nm |
Max. pulse energy | 1000 mJ | |
Max. repetition rate | 300 Hz | |
Max. average power | 300 W | |
Energy stability (sigma, %) | < 1.5 % | |
Beam dimension (V х H) | 36 x 17 (± 2) mm | 37 x 15 (± 2) mm |
Divergency (FWHM, V х H) | < 4.5 x 1.5 mrad | |
Pulse duration (FWHM) | 25 – 30 ns | |
Cooling | water | |
Weight | 950 kg | |
Dimension (L х W х H) | 1750 x 790 x 1820 mm | |
Power | 220/380 V, 50 Hz, < 10000 VA |