Specification
ArF | KrF | XeCl | |
Wavelength (nm) | 193 | 248 | 308 |
Max. pulse energy (mJ) | 20 | 40 | 25 |
Max. repetition rate (Hz) | |||
CL 5100 CL 5200 CL 5300 | 100 200 300 | ||
Max. average power (W) | |||
CL 5100 CL 5200 CL 5300 | 2 4 5 | 4 8 10 | 2.5 5 7 |
Energy stability (sigma, %) | < 2 | ||
Beam dimension (VхH, mm) | 12 х 3.5 | 12 х 4 | |
Divergency (FWHM, mrad, VхH) | 2 х 1 | ||
Pulse duration (FWHM, ns) | 8 – 12 | ||
Cooling | |||
CL 5100 CL 5200/5300 | air water | ||
Weight (kg) | 80 | ||
Dimension (LхWхH, mm) | 780 х 330 х 583 | ||
Power | 220 V, 50 Hz, < 1000 VA |