Features
- Compact laser
- Thyratron switch
- Premix gases
- Built-in energy detector
- Power stabilization
- Computer Control
Specification
| ArF | KrF | XeCl | |
| Wavelength | 193 nm | 248 nm | 308 nm |
| Max. pulse energy | 20 mJ | 40 mJ | 25 mJ |
| Max. repetition rate | |||
| CL 5100 CL 5200 CL 5300 | 100 Hz 200 Hz 300 Hz | ||
| Max. average power | |||
| CL 5100 CL 5200 CL 5300 | 2 W 4 W 5 W | 4 W 8 W 10 W | 2.5 W 5 W 7 W |
| Energy stability (sigma, %) | < 2 % | ||
| Beam dimension (V х H) | 12 х 3.5 mm | 12 х 4 mm | 12 х 4 mm |
| Divergency (FWHM, V х H) | 2 х 1 mrad | ||
| Pulse duration (FWHM) | 8 – 12 ns | ||
| Cooling | |||
| CL 5100 CL 5200/5300 | air water | ||
| Weight | 80 kg | ||
| Dimension (L х W х H) | 780 х 330 х 583 mm | ||
| Power | 220 V, 50 Hz, < 1000 VA | ||