CL 5000

 

Features

  • Compact laser
  • Thyratron switch
  • Premix gases
  • Built-in energy detector
  • Power stabilization
  • Computer Control

 

Specification

ArF KrF XeCl
Wavelength 193 nm 248 nm 308 nm
Max. pulse energy 20 mJ 40 mJ 25 mJ
Max. repetition rate
CL 5100
CL 5200
CL 5300
100 Hz
200 Hz
300 Hz
Max. average power
CL 5100
CL 5200
CL 5300
2 W
4 W
5 W
4 W
8 W
10 W
2.5 W
5 W
7 W
Energy stability (sigma, %) < 2 %
Beam dimension (V х H) 12 х 3.5 mm 12 х 4 mm 12 х 4 mm
Divergency (FWHM, V х H) 2 х 1 mrad
Pulse duration (FWHM) 8 – 12 ns
Cooling
CL 5100
CL 5200/5300
air
water
Weight 80 kg
Dimension (L х W х H) 780 х 330 х 583 mm
Power 220 V, 50 Hz, < 1000 VA

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