Features
- Compact laser
- Power stabilization
- Built-in energy detector
- Premix gases
- Thyratron switch
- Computer Control
Specification
| ArF | KrF | XeCl | |
| Wavelength (nm) | 193 | 248 | 308 |
| Max. pulse energy (mJ) | 20 | 40 | 25 |
| Max. repetition rate (Hz) | |||
| CL 5100 CL 5200 CL 5300 | 100 200 300 | ||
| Max. average power (W) | |||
| CL 5100 CL 5200 CL 5300 | 2 4 5 | 4 8 10 | 2.5 5 7 |
| Energy stability (sigma, %) | < 2 | ||
| Beam dimension (VхH, mm) | 12 х 3.5 | 12 х 4 | |
| Divergency (FWHM, mrad, VхH) | 2 х 1 | ||
| Pulse duration (FWHM, ns) | 8 – 12 | ||
| Cooling | |||
| CL 5100 CL 5200/5300 | air water | ||
| Weight (kg) | 80 | ||
| Dimension (LхWхH, mm) | 780 х 330 х 583 | ||
| Power | 220 V, 50 Hz, < 1000 VA | ||