CL 7000

Features

  • Thyratron Switch
  • Power stabilization
  • Built-in energy detector
  • Premix gases
  • Computer control

Specification

ArF KrF XeCl
Wavelength (nm) 193 248 308
Max. pulse energy (mJ) 250 400 300
Max. repetition rate (Hz)
CL 7020
CL 7050
CL 7100
20
50
100
Max. average power (W)
CL 7020
CL 7050
CL 7100
5
10
20
8
20
35
6
15
25
Energy stability (sigma, %) < 2
Beam dimension (VхH, mm) 21 х 6 21 х 6 22 х 7
Divergency (FWHM, mrad, VхH) 4.5 х 1.5
Pulse duration (FWHM, ns) 17 20 20
Cooling
CL 7020
CL 7050/CL 7100
air
water
Weight (kg) 170
Dimension (LхWхH, mm) 1430 х 380 х 760
Power
CL 7020
CL 7050/CL 7100
220 V, 50 Hz, < 1500 VA
3 phases, 220/380 V, 50 Hz, <3500 VA

Socials