CL 7000

Features

  • Thyratron Switch
  • Premix gases
  • Built-in energy detector
  • Power stabilization
  • Computer control

Specification

ArF KrF XeCl
Wavelength (nm) 193 nm 248 nm 308 nm
Max. pulse energy (mJ) 250 mJ 400 mJ 300 mJ
Max. repetition rate
CL 7020
CL 7050
CL 7100
20 Hz
50 Hz
100 Hz
Max. average power
CL 7020
CL 7050
CL 7100
5 W
10 W
20 W
8 W
20 W
35 W
6 W
15 W
25 W
Energy stability (sigma, %) < 2 %
Beam dimension (V х H) 23 х 8 mm 23 х 9 mm 23 х 11 mm
Divergency (FWHM, V х H) 4.5 х 1.5 mrad
Pulse duration (FWHM) 17 ns 20 ns 20 ns
Cooling
CL 7020
CL 7050 / CL 7100
air
water
Weight 170 kg
Dimension (L х W х H) 1430 х 380 х 760 mm
Power
CL 7020
CL 7050 / CL 7100
220 V, 50 Hz, < 1500 VA
220/380 V, 50 Hz, < 3500 VA

Excimer laser with support and beam delivery system for Pulse Laser deposition. Beam delivery systems can be optimized according customer specification ( beam position, focal distance, beam homogeneity, etc)

Socials