Specification
ArF | KrF | XeCl | |
Wavelength (nm) | 193 nm | 248 nm | 308 nm |
Max. pulse energy (mJ) | 250 mJ | 400 mJ | 300 mJ |
Max. repetition rate | |||
CL 7020 CL 7050 CL 7100 | 20 Hz 50 Hz 100 Hz | ||
Max. average power | |||
CL 7020 CL 7050 CL 7100 | 5 W 10 W 20 W | 8 W 20 W 35 W | 6 W 15 W 25 W |
Energy stability (sigma, %) | < 2 % | ||
Beam dimension (V х H) | 23 х 8 mm | 23 х 9 mm | 23 х 11 mm |
Divergency (FWHM, V х H) | 4.5 х 1.5 mrad | ||
Pulse duration (FWHM) | 17 ns | 20 ns | 20 ns |
Cooling | |||
CL 7020 CL 7050 / CL 7100 | air water | ||
Weight | 170 kg | ||
Dimension (L х W х H) | 1430 х 380 х 760 mm | ||
Power | |||
CL 7020 CL 7050 / CL 7100 | 220 V, 50 Hz, < 1500 VA 220/380 V, 50 Hz, < 3500 VA |
Excimer laser with support and beam delivery system for Pulse Laser deposition. Beam delivery systems can be optimized according customer specification ( beam position, focal distance, beam homogeneity, etc)