Features
- Thyratron Switch
- Premix gases
- Built-in energy detector
- Power stabilization
- Computer control
Specification
| ArF | KrF | |
| Wavelength (nm) | 193 nm | 248 nm |
| Max. pulse energy (mJ) | 250 mJ | 400 mJ |
| Max. repetition rate | ||
| CL 7020 CL 7050 CL 7100 | 20 Hz 50 Hz 100 Hz | |
| Max. average power | ||
| CL 7020 CL 7050 CL 7100 | 5 W 10 W 20 W | 8 W 20 W 35 W |
| Energy stability (sigma, %) | < 2 % | |
| Beam dimension (V х H) | 23 х 8 mm | 23 х 9 mm |
| Divergency (FWHM, V х H) | 4.5 х 1.5 mrad | |
| Pulse duration (FWHM) | 17 ns | 20 ns |
| Cooling | ||
| CL 7020 CL 7050 / CL 7100 | air water | |
| Weight | 170 kg | |
| Dimension (L х W х H) | 1430 х 380 х 760 mm | |
| Power | ||
| CL 7020 CL 7050 / CL 7100 | 220 V, 50 Hz, < 1500 VA 220/380 V, 50 Hz, < 3500 VA | |
Excimer laser with support and beam delivery system for Pulse Laser deposition. Beam delivery systems can be optimized according customer specification ( beam position, focal distance, beam homogeneity, etc)