Specification
| XeCl | |
| Wavelength | 308 nm |
| Pulse duration (FWHW) | 180 ns |
| Max. pulse energy | 280 mJ |
| Repetition rate | 30 Hz |
| Energy stability (sigma) | < 2 % |
| Beam size (V Х H) | 22 Х 14 mm |
| Divergency (V Х H) | 2.6 Х 1.4 mrad |
| Cooling | air at short term water – long term operation |
| Weight | 170 kg |
| Dimensions (L x W x H) | 1430 × 380 × 760 mm |
| Power | 220/380 V, 50Hz, < 3500 VA |

