CL 7500

Features

  • MOPA lasers system (MOPA – Master Oscillator Power Amplifier)
  • Consist form two Lasers CL 7020 or CL 7050 based on single optical platform

Specification

ArFKrF
Wavelength193 nm248 nm
Max. pulse energy100 mJ250 mJ
Max. repetition rate
CL 7520
CL 7550
20 Hz
50 Hz
Max. average power
CL 7520
CL 7550
2 W
5 W
5 W
12.5 W
Energy stability (sigma, %)< 2 %
Beam dimension (V х H)20 х 6 mm
Divergency (FWHM, V х H)< 0.2 х 0.2 mrad
Pulse duration (FWHM)20 ns
Bandwidth< 3 pm
Spacial coherence> 5 mm
Temporal coherence> 10 mm
Coolingwater
Weight (without optical table)450 kg
Dimension (L х W х H)2000 х 800 х 750 mm
Power220/380 V, 50 Hz, < 7000 VA

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