Specification
| ArF | KrF | |
| Wavelength | 193 nm | 248 nm |
| Max. pulse energy | 100 mJ | 250 mJ |
| Max. repetition rate | ||
| CL 7520 CL 7550 | 20 Hz 50 Hz | |
| Max. average power | ||
| CL 7520 CL 7550 | 2 W 5 W | 5 W 12.5 W |
| Energy stability (sigma, %) | < 2 % | |
| Beam dimension (V х H) | 20 х 6 mm | |
| Divergency (FWHM, V х H) | < 0.2 х 0.2 mrad | |
| Pulse duration (FWHM) | 20 ns | |
| Bandwidth | < 3 pm | |
| Spacial coherence | > 5 mm | |
| Temporal coherence | > 10 mm | |
| Cooling | water | |
| Weight (without optical table) | 450 kg | |
| Dimension (L х W х H) | 2000 х 800 х 750 mm | |
| Power | 220/380 V, 50 Hz, < 7000 VA | |