Specification
ArF | KrF | |
Wavelength | 193 nm | 248 nm |
Max. pulse energy | 100 mJ | 250 mJ |
Max. repetition rate | ||
CL 7520 CL 7550 | 20 Hz 50 Hz | |
Max. average power | ||
CL 7520 CL 7550 | 2 W 5 W | 5 W 12.5 W |
Energy stability (sigma, %) | < 2 % | |
Beam dimension (V х H) | 20 х 6 mm | |
Divergency (FWHM, V х H) | < 0.2 х 0.2 mrad | |
Pulse duration (FWHM) | 20 ns | |
Bandwidth | < 3 pm | |
Spacial coherence | > 5 mm | |
Temporal coherence | > 10 mm | |
Cooling | water | |
Weight (without optical table) | 450 kg | |
Dimension (L х W х H) | 2000 х 800 х 750 mm | |
Power | 220/380 V, 50 Hz, < 7000 VA |