CL 7700

Features

  • Thyratron Switch
  • Premix gases
  • Built-in energy detector
  • Power stabilization
  • Computer control

Specification

ArF KrF
Wavelength 193 nm 248 nm
Max. pulse energy 400 mJ 750 mJ
Max. repetition rate
СL 7720
CL 7750
20 Hz
50 Hz
Max. average power
СL 7720
CL 7750
7 W
14 W
15 W
35 W
Energy stability (sigma, %) < 2 %
Beam dimension (V х H) 28 х 10 mm
Divergency (FWHM, V х H) 4.5 х 2 mrad
Pulse duration (FWHM) 20 ns 30 ns
Cooling water
Weight 190 kg
Dimension (L х W х H) 1430 х 380 х 760 mm
Power 220/380 V, 50 Hz, < 3500 VA

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