Specification
ArF | KrF | |
Wavelength | 193 nm | 248 nm |
Max. pulse energy | 400 mJ | 750 mJ |
Max. repetition rate | ||
СL 7720 CL 7750 | 20 Hz 50 Hz | |
Max. average power | ||
СL 7720 CL 7750 | 7 W 14 W | 15 W 35 W |
Energy stability (sigma, %) | < 2 % | |
Beam dimension (V х H) | 28 х 10 mm | |
Divergency (FWHM, V х H) | 4.5 х 2 mrad | |
Pulse duration (FWHM) | 20 ns | 30 ns |
Cooling | water | |
Weight | 190 kg | |
Dimension (L х W х H) | 1430 х 380 х 760 mm | |
Power | 220/380 V, 50 Hz, < 3500 VA |