Features
- High bean pointing stability
- High bean position stability
- High repetition rate
- HV solid state switch
- Compact design
- Built-in energy oil-free vacuum pump with halogen filter
- Built-in energy detector
- Power stabilization
- Computer control
Specification
| ArF | KrF | XeCl | |
| Wavelength | 193 nm | 248 nm | 308 nm |
| Max. pulse energy | 15 mJ | 25 mJ | 12 mJ |
| Max. repetition rate | 1100 Hz | ||
| Max. average power | 14 W | 25 W | 12 W |
| Energy stability (sigma, %) | < 2 % | ||
| Beam dimension (V х H) | 12 х 3.5 mm | 12 х 4 mm | 12 х 4 mm |
| Divergency (FWHM, V х H) | 2 х 1 mrad | ||
| Pulse duration (FWHM) | 10 – 12 ns | ||
| Cooling | water | ||
| Weight | 85 kg | ||
| Dimension (L х W х H) | 890 х 340 х 460 mm | ||
| Power | 220 V, 50 Hz, < 1000 VA | ||