Features
- High bean pointing stability
- High bean position stability
- High repetition rate
- HV solid state switch
- Compact design
- Built-in energy oil-free vacuum pump with halogen filter
- Built-in energy detector
- Power stabilization
- Computer control
Specification
| ArF | KrF | XeCl | |
| Wavelength (nm) | 193 | 248 | 308 |
| Max. pulse energy (mJ) | 15 | 25 | 12 |
| Max. repetition rate (Hz) | 500* | ||
| Max. average power (W) | 7.5 | 12.5 | 6 |
| Energy stability (sigma, %) | < 2 | ||
| Beam dimension (VхH, mm) | 12 х 3.5 | 12 х 4 | 12 х 4 |
| Divergency (FWHM, mrad, VхH) | 2 х 1 | ||
| Pulse duration (FWHM, ns) | 10 – 12 | ||
| Cooling | water | ||
| Weight (kg) | 85 | ||
| Dimension (LхWхH, mm) | 890 х 340 х 460 | ||
| Power | 220 V, 50-60 Hz, < 1000 VA | ||
* – possible configuration of 1000 and 2000 Hz