CLS 5000

Features

  • High bean pointing stability
  • High bean position stability
  • High repetition rate
  • HV solid state switch
  • Compact design
  • Built-in energy oil-free vacuum pump with halogen filter
  • Built-in energy detector
  • Power stabilization
  • Computer control

Specification

ArFKrFXeCl
Wavelength (nm)193248308
Max. pulse energy (mJ)152512
Max. repetition rate (Hz)500*
Max. average power (W)7.512.56
Energy stability (sigma, %)< 2
Beam dimension (VхH, mm)12 х 3.512 х 412 х 4
Divergency (FWHM, mrad, VхH)2 х 1
Pulse duration (FWHM, ns)10 – 12
Coolingwater
Weight (kg)85
Dimension (LхWхH, mm)890 х 340 х 460
Power220 V, 50-60 Hz, < 1000 VA

* – possible configuration of 1000 and 2000 Hz

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