CLS 5000

Features

  • High bean pointing stability
  • High bean position stability
  • High repetition rate
  • HV solid state switch
  • Compact design
  • Built-in energy oil-free vacuum pump with halogen filter
  • Built-in energy detector
  • Power stabilization
  • Computer control

Specification

ArF KrF XeCl
Wavelength 193 nm 248 nm 308 nm
Max. pulse energy 15 mJ 25 mJ 12 mJ
Max. repetition rate 1100 Hz
Max. average power 14 W 25 W 12 W
Energy stability (sigma, %) < 2 %
Beam dimension (V х H) 12 х 3.5 mm 12 х 4 mm 12 х 4 mm
Divergency (FWHM, V х H) 2 х 1 mrad
Pulse duration (FWHM) 10 – 12 ns
Cooling water
Weight 85 kg
Dimension (L х W х H) 890 х 340 х 460 mm
Power 220 V, 50 Hz, < 1000 VA

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