Specification
ArF | KrF | XeCl | |
Wavelength (nm) | 193 | 248 | 308 |
Max. pulse energy (mJ) | 15 | 25 | 12 |
Max. repetition rate (Hz) | 500* | ||
Max. average power (W) | 7.5 | 12.5 | 6 |
Energy stability (sigma, %) | < 2 | ||
Beam dimension (VхH, mm) | 12 х 3.5 | 12 х 4 | 12 х 4 |
Divergency (FWHM, mrad, VхH) | 2 х 1 | ||
Pulse duration (FWHM, ns) | 10 – 12 | ||
Cooling | water | ||
Weight (kg) | 85 | ||
Dimension (LхWхH, mm) | 890 х 340 х 460 | ||
Power | 220 V, 50-60 Hz, < 1000 VA |
* – possible configuration of 1000 and 2000 Hz