Features
- High beam pointing stability
- High beam position stability
- High repetition rate
- HV solid state switch
- Compact design
- Built-in energy oil-free vacuum pump with halogen filter
- Built-in energy detector
- Power stabilization
- Computer control

Specification
ArF | KrF | |
Wavelength | 193 nm | 248 nm |
Max. pulse energy | 15 mJ | 25 mJ |
Max. repetition rate | 1000 Hz * | |
Max. average power | 14 W | 25 W |
Energy stability (sigma, %) | < 2 % | |
Beam dimension (V х H) | 12 х 3.5 mm | 12 х 4 mm |
Divergency (FWHM, V х H) | 2 х 1 mrad | |
Pulse duration (FWHM) | 10 – 12 ns | |
Cooling | water | |
Weight | 85 kg | |
Dimension (L х W х H) | 890 х 340 х 460 mm | |
Power | 220 V, 50 Hz, < 1000 VA |
* Up to 2 Khz on request