CLS 5000

Features

  • High bean pointing stability
  • High bean position stability
  • High repetition rate
  • HV solid state switch
  • Compact design
  • Built-in energy oil-free vacuum pump with halogen filter
  • Built-in energy detector
  • Power stabilization
  • Computer control

Specification

ArFKrFXeCl
Wavelength193 nm248 nm308 nm
Max. pulse energy15 mJ25 mJ12 mJ
Max. repetition rate1100 Hz
Max. average power14 W25 W12 W
Energy stability (sigma, %)< 2 %
Beam dimension (V х H)12 х 3.5 mm12 х 4 mm12 х 4 mm
Divergency (FWHM, V х H)2 х 1 mrad
Pulse duration (FWHM)10 – 12 ns
Coolingwater
Weight85 kg
Dimension (L х W х H)890 х 340 х 460 mm
Power220 V, 50 Hz, < 1000 VA

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