Features
- Very high repetition rate up to 6 kHz
- High average power up to 200 W
- HV Solid state switch
- Power stabilization
Standard specification
| ArF | KrF | |
| Wavelength | 193 nm | 248 nm |
| Max. pulse energy | 20 mJ | 40 mJ |
| Max. repetition rate | 4000 Hz | |
| Max. average power | 80 W | 160 W |
| Energy stability (sigma, %) | < 2 % | |
| Beam dimension (V х H) | 14 х 2.5 mm | |
| Divergency (FWHM, V х H) | 3.5 х 1 mrad | |
| Pulse duration (FWHM) | 7 – 9 ns | |
| Cooling | water | |
| Weight | 360 kg | |
| Dimension (L х W х H) | 1890 x 810 x 1840 mm | |
| Power | 220/380 V, 50 Hz, < 7000 VA | |