DC 4000

Features

  • Very high repetition rate up to 6 kHz
  • High average power up to 160 W
  • HV Solid state switch
  • Power stabilization

Specification

ArFKrF
Wavelength193 nm248 nm
Max. pulse energy20 mJ40 mJ
Max. repetition rate4000 Hz
Max. average power100 W200 W
Energy stability (sigma, %)< 2 %
Beam dimension (V х H)14 х 2.5 mm
Divergency (FWHM, V х H)3.5 х 1 mrad
Pulse duration (FWHM)17 – 20 ns
Coolingwater
Weight360 kg
Dimension (L х W х H)1890 x 810 x 1840 mm
Power220/380 V, 50 Hz, < 7000 VA

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