Specification
| Model | IL SP 10 | IL SP 100 | |
| Max. repetition rate | 10 Hz | 100 Hz | |
| Wavelength | 9.2 – 10.8 µm | ||
| Pulse energy (line P20) | 700 mJ * | ||
| Max. average power | 7 W | 60 W | |
| Pulse duration | 50 – 100 ns | ||
| Divergency, M2 | 5.6; E=700 mJ 2.5; E>350 mJ | ||
| Beam Dimension | 11 x 11 mm | ||
| Energy stability, RMS | < 2 % | ||
| Gas consumption at continuous operation | < 2 l/atm•hour | ||
| Cooling | water | ||
| Dimension (L x W x H), weight | 1360 x 382 x 720 mm, 180 kg | ||
| Power | 220/380 V, 50 Hz, < 2000 VA | ||
* – pulse energy can be 1500 mJ (optional)
