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Excimer lasers

Effective and reliable high-power UV sources for maskless lithography, refractive surgery, FBG production, pulsed laser deposition, material processing.

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CL5000

Compact high repetition rate excimer laser

CL7000

Excimer laser for scientific and industrial applications

CL7000 FBG

Excimer laser for the production of fiber Bragg gratings

CL7700

Excimer laser with increased pulse energy

CL7308

Specialized excimer laser with extended pulse duration

CL7500

Excimer laser system with narrow line generation and high spatial coherence

DC4000

High repetition rate excimer laser for microelectronics technologies

7X300

Industrial excimer laser with high pulse energy and high average power

OLS100K

Narrow-linewidth excimer laser for projection photolithography

OLS6000

Excimer laser for lithography

OLS5000

Excimer laser for lithography