
CL5000
Compact high repetition rate excimer laser
Effective and reliable high-power UV sources for maskless lithography, refractive surgery, FBG production, pulsed laser deposition, material processing.

Compact high repetition rate excimer laser

Excimer laser for scientific and industrial applications

Excimer laser for the production of fiber Bragg gratings

Excimer laser with increased pulse energy

Specialized excimer laser with extended pulse duration

Excimer laser system with narrow line generation and high spatial coherence

High repetition rate excimer laser for microelectronics technologies

Industrial excimer laser with high pulse energy and high average power

Narrow-linewidth excimer laser for projection photolithography

Excimer laser for lithography

Excimer laser for lithography