Excimer lasers
OLS100K
Narrow-linewidth excimer laser for projection photolithography
248.4nm
Wavelength
0–1000Hz
Max. repetition rate
Maskless lithography
Features
Specifications
Wavelength | 248.4nm |
Max. repetition rate | 0 – 1000Hz |
Max. pulse energy | 5mJ |
Energy stability | < 3% |
Pulse duration(FWHM) | 7 – 12ns |
Dimension(L х W х H) | 1025 × 450 × 610mm |
Weight | 132kg |
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