Excimer lasers
7X300
Industrial excimer laser with high pulse energy and high average power
300Hz
Max. repetition rate
248, 308nm
Wavelength
Annealing
Features
- HV Solid State Switch
- High pulse eneregy
- High average power
- Built-in energy oil-free vacuum pump with halogen filter
- Built-in energy detector
- Premix gases
- Power stabilization
Specifications
Wavelength, nm
Total variants: 2
| Wavelength | 248nm | 308nm |
| Max. repetition rate | 300Hz | |
| Max. pulse energy | 1000mJ | |
| Max. average power | 300W | |
| Energy stability | < 1.5% | |
| Beam dimension | 35 x 15 (± 2) mm | 37 x 15 (± 2)mm |
| Divergence | ≤ 4.5 x 1.5mrad | |
| Pulse duration | 25 – 35ns | |
| Cooling | water | |
| Power | 220/380 V, 50 Hz, < 10000 VA | |
| Dimension | 1750 x 790 x 1820mm | |
| Weight | 950kg | |
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