Excimer lasers
DC4000
High-frequency excimer laser for microelectronics technologies
4000Hz
Max. repetition rate
193, 248nm
Wavelength
Maskless lithographyMaterial processing
Features
Specifications
Wavelength, nm
Total variants: 2
| Wavelength | 193nm | 248nm |
| Max. repetition rate | 4000Hz | |
| Pulse energy in stabilization mode | 15mJ | 30mJ |
| Average power in stabilization mode | 60W | 120W |
| Energy stability | < 2% | |
| Beam dimension | 14 х 2.5mm | |
| Divergence | 3.5 х 1mrad | |
| Pulse duration | 7 – 9ns | |
| Cooling | water | |
| Power | 220/380 V, 50 Hz, < 20000 VA | |
| Dimension | 1890 x 810 x 1840mm | |
| Weight | 960kg | |
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