Excimer lasers
CL7500
Excimer laser system with narrow line generation and high spatial coherence
< 3pm
Bandwidth
20–50Hz
Max. repetition rate
193, 248nm
Wavelength
LIF-spectroscopyBragg gratings
Features
- Comprises two CL7020 or CL7050 excimer laser heads, special optical bench and synchronizing module
- Master Oscillator- Power Amplifier (MOPA) system design
Specifications
Wavelength, nm
Max. repetition rate, Hz
Total variants: 4
| Wavelength | 193nm | 248nm | 193nm | 248nm |
| Max. repetition rate | 20Hz | 50Hz | ||
| Max. pulse energy | 100mJ | 250mJ | 100mJ | 250mJ |
| Max. average power | 2W | 5W | 12.5W | |
| Energy stability | < 2% | |||
| Beam dimension | 20 х 6mm | |||
| Divergence | < 0.2 х 0.2mrad | |||
| Pulse duration | 20ns | |||
| Cooling | water | |||
| Power | 220/380 V, 50 Hz, < 7000 VA | |||
| Bandwidth | < 3pm | |||
| Spatial coherence | > 5mm | |||
| Temporal coherence | > 10mm | |||
| Dimension | 2000 х 800 х 750mm | |||
| Weight | 450kg | |||
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