Excimer lasers
CL5000
Compact high repetition rate excimer laser
193, 248nm
Wavelength
Bragg gratingsMaterial processingMaskless lithographyLaser vision correction
Features
- High beam pointing stability
- High beam position stability
- High repetition rate
- HV solid state switch
- Compact design
- Built-in energy oil-free vacuum pump with halogen filter
- Built-in energy detector
- Power stabilization
- Computer control
Specifications
Wavelength, nm
Total variants: 8
| Wavelength | 193nm | 248nm | 193nm | 248nm | 193nm | 248nm | 193nm | 248nm |
| Max. repetition rate | 100Hz | 500Hz | 1000Hz | 2000Hz | ||||
| Pulse energy in stabilization mode | 15mJ | 25mJ | 10mJ | 20mJ | 10mJ | 20mJ | 4mJ | 6mJ |
| Average power in stabilization mode | 1.5W | 2.5W | 5W | 10W | 20W | 8W | 12W | |
| Energy stability | < 2% | |||||||
| Beam dimension | (12±0.5) x (4±0.5)mm | (12±0.5) x (3±0.5)mm | (8±0.5) x (3±0.5)mm | |||||
| Divergence | 3x1mrad | 2x1mrad | ||||||
| Pulse duration | 13±1 ns | 12±1 ns | 8±1ns | |||||
| Cooling | air | воздушное | water | водяное | water | |||
| Power | 220 V, 50 Hz, < 2500 VA | |||||||
| Dimension | 890 х 340 х 460mm | |||||||
| Weight | 85kg | |||||||
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