CL5000

Compact high-frequency excimer laser

100–2000Hz

Max. repetition rate

193, 248nm

Wavelength

Bragg gratingsMaterial processingMaskless lithographyLaser vision correction

Features

High beam pointing stability
High beam position stability
High repetition rate
HV solid state switch
Compact design
Built-in energy oil-free vacuum pump with halogen filter
Built-in energy detector
Power stabilization
Computer control

Specifications

Wavelength, nm

Max. repetition rate, Hz

Total variants: 8


Wavelength	193nm	248nm	193nm	248nm	193nm	248nm	193nm	248nm
Max. repetition rate	100Hz		500Hz		1000Hz		2000Hz
Pulse energy in stabilization mode	15mJ	25mJ	10mJ	20mJ	10mJ	20mJ	4mJ	6mJ
Average power in stabilization mode	1.5W	2.5W	5W	10W		20W	8W	12W
Energy stability	< 2%
Beam dimension	(12±0.5) x (4±0.5)mm		(12±0.5) x (3±0.5)mm				(8±0.5) x (3±0.5)mm
Divergence	3x1mrad						2x1mrad
Pulse duration	13±1 ns		12±1 ns				8±1ns
Cooling	air	воздушное	water	водяное		water
Power	220 V, 50 Hz, < 2500 VA
Dimension	890 х 340 х 460mm
Weight	85kg

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