Excimer lasers
OLS5000
Excimer laser for lithography
≤ 0.5pm
Bandwidth
2000Hz
Max. repetition rate
193.3, 248.3nm
Wavelength
10–20W
Average power
Maskless lithography
Features
Specifications
Wavelength, nm
Average power, W
Total variants: 2
| Wavelength | 193.3nm | 248.3nm |
| Max. repetition rate | 2000Hz | |
| Pulse energy in stabilization mode | 5mJ | 10mJ |
| Energy stability | < ±10% | |
| Pulse duration | > 15ns | |
| Bandwidth | ≤ 0.5pm | |
| Average power | 10W | 20W |
| Wavelength tuning range | 193.33–193.40nm | 248.2–248.5nm |
| E95% bandwidth | ≤ 1.4pm | |
| Pulse energy adjustment range | 3.5–5.5mJ | 7.5–12.5mJ |
| Dose stability | < 0.4% | |
| Horizontal beam size | 2.8 ± 0.3mm | |
| Vertical beam size | 15.5 ± 0.8mm | |
| Horizontal beam profile symmetry | ≤ 40% | |
| Vertical beam profile symmetry | ≤ 40% | |
| Horizontal divergence | 1.3 ± 0.5mrad | |
| Vertical divergence | 2.2 ± 0.8mrad | |
| Polarization (horizontal) | > 98% | |
| Dimension | 1740 × 780 × 1840mm | |
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